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Wet Station, Spin Coater, Auto Coater, Mask Aligner, ICP Etcher, Surface Profiler, RTA, ±¤ÇÐÇö¹Ì°æ, E-beam Evaporator, DC Sputter A, DC Sputter B, RF Sputter, Oxidation Furnace A, Oxidation Furnace B, SMD System

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